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HMM Gracel Set 67 33
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Well my dear husband has been working very hard on an update to a. mediafire HMM Gracel Set 67 33 gracel set pt. 29b96b5f61.mp4.1. Field of the Invention
The present invention relates to a method of fabricating a semiconductor memory device, and more particularly, to a method of fabricating a semiconductor memory device having a DRAM cell with a vertical capacitor.
2. Description of the Related Art
Recently, a high integration of semiconductor memory devices such as a DRAM (Dynamic Random Access Memory) device is demanded. In order to achieve the high integration, a smaller design rule is required. The design rule generally means a size of a device obtained by patterning. However, some problems arise in the smaller design rule.
The smaller design rule means that the capacitor used in the DRAM cell is reduced. The capacitor is reduced in size due to limitation in the lithography processes. As an example of reducing the capacitor size, the increase of a height of the capacitor (i.e., the thickness of a capacitor insulating film) is studied. The capacitor generally includes a lower capacitor electrode, an upper capacitor electrode and a capacitor insulating film. The height of the capacitor insulating film includes a main part and a field. The field is an extension of the insulating film from the main part to the lower and upper capacitor electrodes. The extension of the field needs to be designed carefully. The field should be designed such that the insulation film is formed in the lower and upper capacitor electrodes and the storage node contact plugs (see, S. Mor 0b46394aab
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